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Distinctive and compact 3-axis precision movement platform, new from PI. Auburn, MA – PI, a worldwide chief in precision movement management and nanopositioning merchandise releases a singular planar XY-Theta-Z nanopositioning stage based mostly on air bearings and direct drive motors.
Picture Credit score: PI (Physik Instrumente) LP
Not like typical multi-axis levels, the A-361 employs just one transferring platform shared amongst all three axes. One in every of its benefits is the ultra-low profile of solely 40mm, regardless of that includes an built-in vacuum chuck to accommodate wafers or different samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers distinctive precision in a remarkably compact package deal.
Non-Contact, Upkeep-Free
By incorporating non-contact elements, it ensures frictionless operation, thereby providing not solely ultra-high precision but additionally superior efficiency and a very maintenance-free, just about infinite service life. The built-in position-locking functionality proves helpful for operations requiring utmost stability with zero servo jitter.
Clear-room Appropriate
Because of the fully contact-free operation, and the shortage of lubricants, the XY-Theta stage is a wonderful match for clear room purposes.
6-DOF Improve
If precision movement in 6 axes is required, the A-361 XY-Theta stage might be seamlessly built-in with the A-523 Z Tip/Tilt stage making a compact 6 levels of freedom nanopositioning system with solely 100mm whole top. 6-axis nanopositioning programs are sometimes utilized in photonics alignment and semiconductor inspection purposes.
Extra data on the A-361 Low profile XY-Theta Air Bearing Multi-Axis Nanopositioning Stage
Industries Served
Semiconductor check and metrology, wafer inspection, photonics alignment, fiber positioning, optics alignment, flat display screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is right for cleanroom purposes.
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