State-of-the-art electron-beam lithography system


Funding in new manufacturing software for the semiconductor gear business – Jenoptik is investing a low double-digit million-euro quantity in a state-of-the-art system for the high-tech fab at the moment underneath building in Dresden.

High-tech fab in Dresden receives state-of-the-art electron-beam lithography system

Picture Credit score: DrHitch/​​​​​​​

The brand new electron-beam lithography system (E-Beam) will probably be used to fabricate high-precision micro-optical elements for purchasers within the semiconductor and optical communication sectors. The producer is the Jena based mostly e-beam know-how specialist Vistec Electron Beam GmbH. The system will probably be delivered at the start of 2025.

Creating the smallest buildings with most precision

This sort of electron-beam lithography system can “write” buildings with a precision within the 10-nanometer vary (roughly 1/2,000th of a hair) on substrates as much as 300 mm in diameter.

The Vistec SB3050-2 electron-beam lithography system is predicated on the so-called Variable Formed Beam precept, with which even massive areas may be structured extremely precisely and successfully.

The excessive diploma of automation, mixed with flexibility by way of usable substrates, are additional options of the Vistec SB3050-2 that allow it for use in an industrial setting. The system is provided with Cell Projection performance, opening up additional potentialities for functions in micro-optics. 

Jenoptik has been energetic in Dresden since 2007. With the new high-tech fab at Airportpark Dresden, the corporate is consolidating its manufacturing, which is at the moment unfold throughout a number of small exterior websites, whereas on the identical time increasing its capacities. The clear room manufacturing within the new fab will cowl 2,000 sq. meters with clear room areas of courses ISO 5 and three and meet the best necessities for freedom from vibrations and temperature stability.

Excessive environmental requirements are taken under consideration for all the fab: Jenoptik is striving to satisfy the at the moment most complete and stringent constructing standards by way of sustainability with the “KfW 40 Commonplace” and the “LEED Gold Commonplace Certification”. On the identical time, high-quality jobs will probably be created and the variety of workers on web site will enhance to a complete of greater than 120. The Saxon state capital will thus develop into the principle location for the micro-optics sector.

About Jenoptik

Optical applied sciences type the idea of our enterprise. Jenoptik is a world photonics group and includes the 2 divisions Superior Photonic Options and Sensible Mobility Options. Non-photonic actions, notably for the automotive market, are operated as impartial manufacturers inside the Non-Photonic Portfolio Firms.

Our key markets primarily embrace semiconductor & electronics, life science & medical know-how in addition to sensible mobility. Greater than 4,400 individuals worldwide work for the Jenoptik Group, which is headquartered in Jena (Germany). JENOPTIK AG is listed on the German Inventory Trade in Frankfurt and traded on the MDax and TecDax. In fiscal 12 months 2022, Jenoptik generated income of 980.7 million euros.

About Vistec Electron Beam GmbH

As a long-standing gear provider, Vistec Electron Beam GmbH, Jena (Germany) is offering main know-how options for superior electron-beam lithography. Based mostly on the Variable Formed Beam (VSB) precept, the electron-beam lithography methods are primarily utilized for industrial and superior analysis functions, reminiscent of electron-beam direct write in semiconductor manufacturing, together with compound semiconductor direct write, masks writing in addition to photonics and several other new rising markets.

Environment friendly knowledge processing & modern publicity methods (e.g. Cell Projection) open up new functions, particularly within the subject of AR/VR. Vistec’s know-how options automated dealing with, in addition to excessive flexibility, writing accuracy and productiveness and due to this fact is appropriate for prototyping and low quantity manufacturing. Along with its manufacturing facility in Germany, Vistec maintains service & assist facilities in Asia Pacific, USA and Europe.


Supply hyperlink

Robotics Summit & Expo early fowl pricing ends March 8

This film on Hulu deserves extra consideration